DocumentCode
9049
Title
Growth Optimization and Characterization of Reactively Sputtered Zirconium Nitride Thin Films for III-V Buffer Layer Applications
Author
Jerome J. Cuomo استاد راهنما , Dennis M. Maher استاد مشاور , Mohamed A. Bourham استاد مشاور
University
Raleigh North Carolina State Unieversity
Grade
نامعلوم
Major
Master of Science )Materials Science and Engineering(
Number of pages
0
Publish Date
2004
Keyword
Thin films , sputtering , Zirconium nitride
Note
01
Language
انگليسي
Link To Document