Title :
Growth Optimization and Characterization of Reactively Sputtered Zirconium Nitride Thin Films for III-V Buffer Layer Applications
Author :
Jerome J. Cuomo استاد راهنما , Dennis M. Maher استاد مشاور , Mohamed A. Bourham استاد مشاور
University :
Raleigh North Carolina State Unieversity
Major :
Master of Science )Materials Science and Engineering(
Keyword :
Thin films , sputtering , Zirconium nitride
