DocumentCode
9178
Title
DEVELOPMENT OF HIGH RESOLUTION DEPTH PROFILING OF ULTRA SHALLOW DOPANT IMPLANTS WITH SIMS
Author
Veena Misra استاد مشاور , Dieter P. Griffis استاد مشاور , J. Michael Rigsbee استاد مشاور , Phillip E. Russell استاد راهنما
University
Raleigh North carolina state university
Grade
نامعلوم
Major
PhD )Material Science and Engineering(
Number of pages
0
Publish Date
2000
Note
01
Language
انگليسي
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