DocumentCode
9213
Title
Formation of Metal Silicide and Metal Germanosiliciide Contacts to Si 1 - x Ge x Alloys
Author
Dale Sayers استاد راهنما
University
Raleigh North carolina state university
Grade
نامعلوم
Major
PhD )Physics(
Number of pages
0
Publish Date
2004
Keyword
germanium titanium cobalt titanium interlayer mediated epitaxy thermodyanamic stability silicon
Note
01
Language
انگليسي
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