Title :
Device Fabrication and Characterization for Alternative Gate Stack Devices
Author :
Jon - paul Maria استاد مشاور , Veena Misra استاد مشاور , John R. Hauser استاد مشاور , Carlton M. Osburn استاد راهنما
University :
Raleigh North carolina state university
Major :
PhD )Electrical Engineering(
Keyword :
MOSFET , Scaling , High-k , silicate , HfO2 , Metal Gate