Title :
Spin Coating and photolithography Using Liquid and Supercritical Carbon Dioxide
Author :
Gregory Parsons استاد مشاور , Christine Grant استاد مشاور , Rubem Carbonell استاد مشاور , Joseph Desimone استاد راهنما
University :
Raleigh North carolina state university
Major :
PhD )Chemical Engineering(
Keyword :
spin coating photolithography carbon dioxide supercritical fluid
