تاثير توان انباشت در خواص مكانيكي و اصطكاكي لايه هاينازك كندوپاش شده اكسيد زير كونيوم

Influence of deposition power on mechanical and tribological properties of sputteredzirconium oxide thin films

This paper reports the influence of deposition power on surface morphology, chemical composition and mechanical and tribological properties of zirconium oxide thin films. The Zirconium oxide thin films of 300 nm thickness were deposited by DC reactive magnetron sputtering technique at different powers (100-250 W) on Si substrate. Surface morphology and chemical composition of the films were studied with atomic force microscopy (AFM) and field emission scanning electron microscopy (FESEM), respectively. Mechanical and tribological measurements were performed by nano-indentation and scratch tests respectively. Consistent with chemical composition, the values of elastic modulus were almost constant with variation of deposition power The results showed that the hardness was increased by increasing of deposition power up to 200 W and then decreased. Coefficient of friction had an inverse behavior with hardness. The surface morphology study showed that these behaviors were affected by films surface roughness