شماره ركورد كنفرانس :
3222
عنوان مقاله :
Developing a New Pressure Measurement Mechanism Based On Squeeze Film Damping Effect
پديدآورندگان :
Ghafari Aboozar Mechatronics Department of Emerging Technologies - Faculty of Engineering - University of Tabriz , Ghanbari Ahmad Mechatronics Department of Emerging Technologies - Faculty of Engineering - University of Tabriz , Kamanzadeh Shayan Electrical Department - Engineering Faculty - Ferdowsi University , Abbasian Karim Mechatronics Department of Emerging Technologies - Faculty of Engineering - University of Tabriz , Saghir Hamidreza Mechatronic Department - Sharif University of Technology
كليدواژه :
MEMS , Pressure , Squeeze Film Damping , Step response
عنوان كنفرانس :
دومين كنفرانس بين المللي كنترل، ابزار دقيق و اتوماسيون
چكيده لاتين :
This paper introduces a novel approach for measuring low pressures based on MEMS technology. In this
technique the mechanism of squeeze film damping is used. A voltage is applied to a fixed-fixed MEMS beam and its step
response is obtained; for each pressure there is a different response. Then the settling time is measured and we can relate
each settling time with a defined pressure. Here, first we use some equations to relate pressure with the squeeze film
damping effect; after that we use a micro beam model and relate its parameters with pressure. Then we use numerical
analysis and simulation to show the procedure of pressure measuring. All simulation results are shown and discussed.
