3632

Electrode Configuration for Complete Suppression of Spurious Modes in Capacitive RF MEMS Ring Resonators

Kobra Behzadi ,

RF MEMS , Resonator , Spurious modes , Motional resistance , Quality factor (key words)

ايران

Masoud Baghelani

RF MEMS; Resonator; Spurious modes; Motional resistance; Quality factor (key words)