پديدآورندگان :
Shahshenas S sh.shahshenas@gmail.com Department of Physics, Shabestar Branch, Islamic Azad University, Shabestar, East Azarbayjan, Iran , ghafoorifard H Department of electrical engineering, Amirkabir University of Technology , Goudarzi S Department of Plasma Research School, NSTRI, Tehran, Iran , Mazandarani A. Department of Plasma Research School, NSTRI, Tehran, Iran
كليدواژه :
DBD Plasma , Plasma Treatment , Comsol Multiphysics , DBD Simulation
چكيده فارسي :
In this study an axi-symmetric geometry of a planar disc shape DBD is simulated in DC discharge module of Comsol
multiphysics simulator to investigate the effect of frequency, permittivity coefficient of dielectric and electrode material on electron density. Secondary electron emission constant of the electrode is predicted to have a remarkable influence on the electron density. Also it is seen that the calculated electron density increases with increasing the relative permittivity and frequency. Reviewing the simulation results of plasma homogeneity reveals the substantial importance of applied frequency.
