Robust Trajectory Tracking Control for a MEMS Vibratory Gyroscope with a Finite Convergence Time

In this paper, a robust finite time tracking problem is studied for a z-axis MEMS vibratory gyroscope subjected to bounded disturbances and parameter uncertainties. By using the nonsingular terminal sliding mode control method, external control forces are designed to steer displacements of the MEMS gyroscope to desired trajectories within a total adjustable finite time. Moreover, the Lyapunov theorem is applied to prove the global finite time stability of the closed-loop MEMS gyro system. Also, a new formula is extracted to determine the upper bound of the required total finite time. Finally, a numerical example is provided to show the effectiveness of the proposed control scheme. .