شماره ركورد كنفرانس :
3926
عنوان مقاله :
Design and Simulation of a Micromachined Membrane Flow-Meter
پديدآورندگان :
Valizadeh Yaghmourali Yousef Y.valizadeh.y@gmail.com Microelectronic Research Laboratory of Urmia University Urmia, Iran, 57159 , Tavakoli Hadi Ha.tavakoli@urmia.ac.ir Microelectronic Research Laboratory of Urmia University Urmia, Iran, 57159 , Abbaspour sani Ebrahim E.abbaspour@urmia.ac.ir Microelectronic Research Laboratory of Urmia University Urmia, Iran, 57159
كليدواژه :
component: Piezoresistive , MEMS , Flow Velocity , Flowmeter , Sensitivit
عنوان كنفرانس :
بيست و چهارمين كنفرانس مهندسي برق ايران
چكيده فارسي :
In this paper a new piezoresistive flow-meter has been proposed. For enhancement of sensitivity, a large membrane is placed vertically against the flow direction to maximize the air drag force. In the new proposed structure supporting beams do not scale up the total die-size, and due to large torsion spring constant, considerable incensement in mechanical stability is achieved. The range of measureable flow is 0-6m/s, and maximum variation of piezoresistors is 3.6 percent. Bulk micromachining technology is proposed for fabrication process and total die-size of flowmeter is 1.5×1.5 mm2.
