بررسي تاثير ضخامت لايه ي كاتاليست و آهنگ ورود جريان بخار اتانول به محفظه واكنش، در رشد نانولوله هاي كربني موازي به روش رسوب شيميايي بخار

Vertically aligned carbon nanotubes (VA-CNTs) were synthesized by chemical vapor deposition (CVD) using Cobalt (Co) catalyst supported by Aluminum oxide (Al2O3) layer. A mixture of the gases of ethanol vapor and argon was used during the growth. The effect of the rate of hydrocarbon gas (ethanol) entering the chamber, on the length and density of carbon nanotubes were studied. We found that in a fixed pressure of 20 mmHg , by increasing the rate of ethanol vapor, the density and also the length of nanotubes increases up to approximate rate of 1.6 mol/min, and then decreases for higher rates of ethanol. Also, It was found that the diameter, length and density of the nanotubes are controlled by the thickness of the catalyst layer. Scanning electron microscopy (SEM) were utilized to provide information of the length, density and diameter of CNTs under various conditions.