Simulation and Analysis different Mems Pressure Sensor uses Comsol Multiphysics 5.2

The MEMS different pressure sensor has been introduced and presented. The types of pressure sensor and its theory of operation are also included. The most interesting features of Mems capacitive pressure sensors related to low power consumption, high sensitivity and immutability temperature effects. Few models of pressure sensors have been simulated and the results are presented. Simulation results show how the capacitance varies with increase pressure and diaphragm defermation under pressure. The design, modelling and simulation of pressure sensors have been done using Comsol/Multphysics 5.2