بررسي فركانس طبيعي ميكرو تير اپكسي بوسيله روش المان محدود و تئوري هاي الاستيسيته گراديان كرنش، كلاسيك و تنش كوپل

Investigation of Natural Frequency of Epoxy Micro-cantilevers via Finite Element Method and couple stress, classical, and strain gradient elasticity theories

Experimental research has shown that microcantilever-based sensors have wide and diverse applications in various fields. This necessitates the study of the mechanical behavior of microcantilevers under different resonance modes. This study investigated and evaluated the effect of size on the vibration behavior of an epoxy microcantilever in its first four frequency modes using the finite element method. Results showed that increased microcantilever thickness reduces resonant frequency. Large deformations were observed in the third and fourth frequency modes which increases the risk of failure in the microcantilever. Since the deformations in microcantilevers should be low in order for the sensor to have a long operating life, and the sensor has to be highly sensitive for increased accuracy, the second mode of resonant frequency and 20 µm were found as the best operating mode and the best thickness of the epoxy microcantilever-based sensor, respectively. A good agreement was observed between the results of this study and those obtained based on the couple stress theory, classical theory, and strain gradient elasticity theory.

Experimental research has shown that microcantilever-based sensors have wide and diverse applications in various fields. This necessitates the study of the mechanical behavior of microcantilevers under different resonance modes. This study investigated and evaluated the effect of size on the vibration behavior of an epoxy microcantilever in its first four frequency modes using the finite element method. Results showed that increased microcantilever thickness reduces resonant frequency. Large deformations were observed in the third and fourth frequency modes which increases the risk of failure in the microcantilever. Since the deformations in microcantilevers should be low in order for the sensor to have a long operating life, and the sensor has to be highly sensitive for increased accuracy, the second mode of resonant frequency and 20 µm were found as the best operating mode and the best thickness of the epoxy microcantilever-based sensor, respectively. A good agreement was observed between the results of this study and those obtained based on the couple stress theory, classical theory, and strain gradient elasticity theory.