شماره ركورد كنفرانس :
3704
عنوان مقاله :
شبيه سازي گيج خلا يوني بايارد آلپرت با كامسول
عنوان به زبان ديگر :
Simulation of Bayard Alpert ionization vacuum gauge with COMSOL
پديدآورندگان :
mohammadzadeh bazarchi Sadegh smbazarchi@yahoo.com , Urmia University , abaspoor sani Ebrahim e.abbaspour@urmia.ac.ir Urmia University
كليدواژه :
گيج خلاء يوني , سنسور خلاء , گيج يوني كاتد گرم , گيج يوني بايارد آلپرت
عنوان كنفرانس :
پنجمين كنفرانس بين المللي در مهندسي برق و كامپيوتر با تاكيد بر دانش بومي
چكيده فارسي :
: In this paper, the Bayard Alpert ionization vacuum gauge has been simulated using COMSOL. Employing Charged Particle Tracing (CPT) tool in COMSOL, the sensitivity coefficient of the gauge has been calculated from simulation results. Based on the results, the average measured value of sensitivity is 30, which shows compatibility with theoretical value of 28. It must be mentioned that a unique method is used in this article to calculate the sensitivity coefficient and the coefficient diagrams for sensitivity of different vacuum pressures have been obtained through these simulations. This paper also presents a method for obtaining electron velocity and energy and their diagrams.
چكيده لاتين :
: In this paper, the Bayard Alpert ionization vacuum gauge has been simulated using COMSOL. Employing Charged Particle Tracing (CPT) tool in COMSOL, the sensitivity coefficient of the gauge has been calculated from simulation results. Based on the results, the average measured value of sensitivity is 30, which shows compatibility with theoretical value of 28. It must be mentioned that a unique method is used in this article to calculate the sensitivity coefficient and the coefficient diagrams for sensitivity of different vacuum pressures have been obtained through these simulations. This paper also presents a method for obtaining electron velocity and energy and their diagrams.