طراحي و ساخت چشمه پلاسماي كاتد داغ

In this research, a hot cathode plasma source was made and the plasma formation in high vacuum regime (range of 10-3 to 10-4 mbar) was studied by applying magnetic field by means of permanent magnets assembly. Effects of various control parameters such as working pressure, discharge voltage and external electron source (hot tungsten filament) on plasma density were investigated. At a discharge voltage of 57 volt, magnetic field of about 200 Gauss, filament current of 18 ampere, 130 miliampere for discharge current was obtained at a pressure of 1.2×10-4 mbar.