Author/Authors :
ÖZCİVAN, Ahmet Nuri Dokuz Eylül Üniversitesi - Elektronik Malzemeler Üretim ve Uygulama Merkezi (EMUM), Turkey , BİRLİK, Işıl Dokuz Eylül Üniversitesi - Elektronik Malzemeler Üretim ve Uygulama Merkezi (EMUM), Mühendislik Fakültesi, Metalurji ve Malzeme Mühendisliği, Turkey , BEKTAŞ, Murat Dokuz Eylül Üniversitesi - Elektronik Malzemeler Üretim ve Uygulama Merkezi (EMUM), Turkey , ÇELİK, Erdal Dokuz Eylül Üniversitesi - Elektronik Malzemeler Üretim ve Uygulama Merkezi (EMUM), Mühendislik Fakültesi, Metalurji ve Malzeme Mühendisliği, Turkey
Title Of Article :
Parameter Adjustment in a PLD System Used for YBCO Films on STO Substrates and its Characteristic Verification
Abstract :
Pulsed laser deposition (PLD) system is a unique ceramic film deposition equipment with complex technological vacuum and laser apparatus. Until now, the achieved depositions are verified the success of PLD systems in literature. Recently, computer controllable PLD systems are popular as a thin film production technique in which laser and vacuum apparatus are completely software controllable. However, this kind of manageable thin film deposition system requires adjustment of the equipment parameters both in laser box and chamber, as well as lens and mirrors, in order to attain the successive film properties. In our system, laser and chamber are guided by computer software supplied by Neocera Company. Using the software control, we adjust gas flow rates both in laser and chamber; adjust the pressure inside the chamber where sensors are used for these controls. For successive deposition, effective parameters are selected and regulated via experimental experiences on laser and chamber working conditions. Making the above adjustments, we aim to standardize the deposition process by enhancing PLD working conditions by which reliability and reproducibility are attained since those have crucial importance for scientific studies. In this paper, we explain adjustments on working conditions of our PLD system used for coating YBCO on STO (SrTiO3) substrates. We experimented the PLD system which is settled in our thin film laboratory and explain the experiences on the deposited film as a parameter of the assumed working conditions, such as chamber pressure and substrate temperature. Finally, we display the scan and characterization results obtained for different conditions.
NaturalLanguageKeyword :
Superconductor thin film , YBCO , Coating technique via PLD
JournalTitle :
Afyon Kocatepe University Journal Of Science and Engineering
