Ocakoğlu, Kasım Mersin Üniversitesi - Tarsus Teknoloji Fakültesi, İleri Teknoloji, Eğitim, Araştırma ve Uygulama Merkezi - Enerji Sistemleri Mühendisliği Bölümü, Turkey

Preparation of n-Type Silicon Coated Nano-Porous Membrane for Different Purposes

27794

Nanoporous anodic aluminum oxide (AAO) with uniform and homogen pore diameters has been found wide range applications due to easy fabrication processes. Modification of AAO template surface by different functional groups increase the stability of these structures and also their potential utility in many applications. In this study, firstly the membranes which have regular nano‐channels was prepared by anodization technique. In fact, commercially available AAO membranes with non‐uniform nanochannel formations poses problems in terms of the applications. In order to improve the potential applications of AAO nanoporous structures, the surface of AAO membran was coated with an n‐type silicon by Plasma‐Enhanced Chemical Vapor Deposition (PECVD) Method. Before coating of AAO membranes with n‐type silicon, the regular nanochannels was obtained by exploring to n‐type anodization process. Then, the AAO nanoporous membrane surface and the inner wall were coated with n‐type silicon layer by PECVD method with thickness of ca. 40 nm. These membranes were characterized by AFM, SEM, EDX and UV‐Visible absorption spectroscopy. The resulting membranes exhibit the absorption between 300‐700 nm which confirms also that of n‐type membrane is coated with silicone. The obtained transparent n‐type silicon‐coated membranes can be used in the construction of nano‐devices for different purposes, including photovoltaic applications.

468

Nano‐Porous Membrane , n‐Type Silicon , Anodic Aluminium Oxide Membrane , AAO , Semiconductor , Nano‐device design

Afyon Kocatepe University Journal Of Science an‎d Engineering

473