Abstract :
In this study, the influence of N2 gas concentration on the surface and optical properties of BN thin films was investigated. A cubic BN phase, from the hexagonal structure, was produced by nitrogen changing during the deposition process. All BN thin films were deposited on glass substrates by the reactive radio frequency magnetron sputtering method with argon / nitrogen (ratios of 3:7, 1:1 and 4:1) gas mixtures. For the determination of the surface and optical properties of these two phases, field emission scanning electron microscopy, wavelength dispersive x-ray spectroscopy, atomic force microscopy, UV-Vis spectrophotometry, tensiometry, and interferometry tools were used. According to the results, the deposited films are homogeneous, compact nano-structured, and hydrophobic. Perfect stoichiometric ratios were obtained for the deposited samples. Phase transitions to cubic phase from hexagonal BN crystal system were only obtained by N2 gas concentration.
NaturalLanguageKeyword :
Nano , thick BN layer , Cubic BN , Hexagonal BN , Surface properties , Optical properties
