Integrated-optic implementation of a confocal scanning optical microscope

Author

Sheard, Stephen ; Suhara, Toshiaki ; Nishihara, Hiroshi

Author_Institution

Dept. of Electron., Osaka Univ., Japan

Volume

11

Issue

8

fYear

1993

fDate

8/1/1993 12:00:00 AM

Firstpage

1400

Lastpage

1403

Abstract

A confocal scanning optical microscope implemented in an integrated-optic structure is demonstrated. The compact nature of the device proves to be more suitable for environments where mechanical shock can result in optical misalignment of discrete components. The device is implemented in a thin-film optical waveguide with optical fiber connections for light input and output. An objective lens and focusing beam splitter are incorporated into the waveguide structure to form the sensing head of the microscope. The fabrication of the device is discussed, and both intensity and differential contrast images are presented to demonstrate the device operation. The confocal imaging characteristics of the microscope are also demonstrated

Keywords

focusing; integrated optics; optical couplers; optical fibres; optical films; optical images; optical microscopes; optical waveguides; compact nature; confocal imaging characteristics; confocal scanning optical microscope; device operation; differential contrast images; discrete components; focusing beam splitter; integrated-optic structure; intensity; light input; light output; mechanical shock; objective lens; optical fiber connections; optical misalignment; sensing head; thin-film optical waveguide; waveguide structure; Electric shock; Integrated optics; Lenses; Optical devices; Optical fibers; Optical films; Optical microscopy; Optical sensors; Optical waveguides; Thin film devices;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.254101

Filename

254101