• DocumentCode
    1000460
  • Title

    Degradation Mode Analysis on Highly Reliable Guardring-Free Planar InAlAs Avalanche Photodiodes

  • Author

    Ishimura, Eitaro ; Yagyu, Eiji ; Nakaji, Masaharu ; Ihara, Susumu ; Yoshiara, Kiichi ; Aoyagi, Toshitaka ; Tokuda, Yasunori ; Ishikawa, Takahide

  • Author_Institution
    Mitsubishi Electr. Corp., Itami
  • Volume
    25
  • Issue
    12
  • fYear
    2007
  • Firstpage
    3686
  • Lastpage
    3693
  • Abstract
    This paper presents the high reliability of the guardring-free planar InAlAs avalanche photodiode (APD) and its degradation mode analysis. We have conducted long-term and high-temperature aging tests under 175degC, 200degC, 225degC, and 250degC. There were three degradation modes as follows: 1) the increase in the dark current; 2) the decrease in the breakdown voltage; and 3) short circuit. Their thermal activation energies were 0.96, 1.30, and 0.93 eV, respectively. Their estimated mean times to failures at 85 are 25, 100, and 22 million hours, respectively. Increased dark current is generated in the upper side of the absorbing layer. The breakdown voltage decreased with aging time because the depletion width in the absorbing layer shrinks from the region side. Any degradation mode on the surfaced p-n junction did not appear in spite of the 10 000-h aging test at a high temperature of 200degC. The guardring-free planar InAlAs APD has the advantage of high reliability because the electric field of a surfaced p-n junction is weakened by the underlying field control layer.
  • Keywords
    III-V semiconductors; aluminium compounds; avalanche breakdown; avalanche photodiodes; indium compounds; semiconductor device reliability; InAlAs; breakdown voltage; dark current; degradation mode analysis; guardring-free photodiode; planar InAlAs avalanche photodiodes; reliability; short circuit; temperature 175 degC; temperature 200 degC; temperature 225 degC; temperature 250 degC; thermal activation energy; time 10000 h; Aging; Avalanche photodiodes; Dark current; Etching; Indium compounds; Indium phosphide; P-n junctions; Telecommunication network reliability; Testing; Thermal degradation; Avalanche photodiode (APD); InAlAs; reliability; thermal activation energy;
  • fLanguage
    English
  • Journal_Title
    Lightwave Technology, Journal of
  • Publisher
    ieee
  • ISSN
    0733-8724
  • Type

    jour

  • DOI
    10.1109/JLT.2007.909357
  • Filename
    4397002