DocumentCode
1000477
Title
Three-dimensional simulation of inverse narrow-channel effect
Author
Shigyo, N. ; Konaka, M. ; Dang, R.L.M.
Author_Institution
Toshiba Corporation, Integrated Circuits Laboratory, Toshiba Research & Development Center, Kawasaki, Japan
Volume
18
Issue
6
fYear
1982
Firstpage
274
Lastpage
275
Abstract
Based on a three-dimensional numerical analysis, it is shown that narrow-width MOSFETs of the BOX structure1 exhibit an `inverse¿ narrow-channel effect whereby their threshold voltages become lower and lower with decreasing channel width. The phenomenon is attributed to a pronounced enhancement of the channel edge region due to a crowding of the fringing field.
Keywords
insulated gate field effect transistors; semiconductor device models; BOX structure; MOSFET; fringing field; inverse narrow-channel effect; semiconductor device model; simulation; three-dimensional numerical analysis;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19820187
Filename
4249644
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