Title :
Parylene surface-micromachined membranes for sensor applications
Author :
Fan, Zhifang ; Engel, Jonathan M. ; Chen, Jack ; Liu, Chang
Author_Institution :
Syst. Group, Univ. of Illinois, Urbana, IL, USA
fDate :
6/1/2004 12:00:00 AM
Abstract :
This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.
Keywords :
force sensors; membranes; metallic thin films; micromachining; microsensors; polymer films; strain gauges; surface treatment; tactile sensors; thermal resistance; fluid shear stress sensor; force sensor; integrated strain gauges; parylene surface-micromachined membranes; sensor applications; thermal resistors; thin film metals; Biomembranes; Capacitive sensors; Fabrication; Process design; Resistors; Substrates; Tactile sensors; Testing; Thermal resistance; Transistors; Parylene; polymer; strain gauges; surface micromachining;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2004.825295
