Stress voltage polarity dependence of thermally grown thin gate oxide wearout

Gate oxide wearout for thermally grown 57-190-A SiO₂ films in a polycrystalline silicon-SiO₂-Si structure prepared on n-type and p-type wafers was studied by examining time-dependent dielectric breakdown (TDDB) under 1-mA/cm² constant current with positive and negative voltages at 250°C. TDDB lifetimes for positive voltage stress are more than one order longer than those for negative voltage stress. TDDB lifetimes depend on oxide thickness, that is, they increase for positive voltage stress and decreases for negative voltage stress with decreasing oxide thickness. They also depend on whether the oxide films are prepared on n-type or p-type wafers. After the positive voltage TDDB stress, negative charges are predominantly produced in the oxide layer, and the electric field at the cathode in the oxide film slightly decreases. On the contrary, after the negative voltage TDDB stress, positive charges are predominantly produced at the cathode in the oxide layer and the electric field at the cathode is built up, resulting in an increase in Fowler-Nordheim tunnel current flowing though the oxide film