DocumentCode
1003211
Title
Reliability Analysis of Torsional MEMS Varactor
Author
Venkatesh, C. ; Bhat, Navakanta
Author_Institution
Indian Inst. of Sci., Bangalore
Volume
8
Issue
1
fYear
2008
fDate
3/1/2008 12:00:00 AM
Firstpage
129
Lastpage
134
Abstract
This paper discusses reliability issues in torsional MEMS varactor. Self-actuation due to high ac signals is analyzed, and solutions are proposed. The mode of failure at high actuation voltages is analyzed and established through experiments. Issues like stiction due to high voltages and effect of high residual stress are studied experimentally.
Keywords
micromechanical devices; semiconductor device reliability; varactors; reliability analysis; self-actuation; torsional MEMS varactor; MEMS varactors; Microelectromechanical systems (MEMS) varactors; Self-actuation; residual; self-actuation; stiction;
fLanguage
English
Journal_Title
Device and Materials Reliability, IEEE Transactions on
Publisher
ieee
ISSN
1530-4388
Type
jour
DOI
10.1109/TDMR.2007.914016
Filename
4399959
Link To Document