Title :
Reliability Analysis of Torsional MEMS Varactor
Author :
Venkatesh, C. ; Bhat, Navakanta
Author_Institution :
Indian Inst. of Sci., Bangalore
fDate :
3/1/2008 12:00:00 AM
Abstract :
This paper discusses reliability issues in torsional MEMS varactor. Self-actuation due to high ac signals is analyzed, and solutions are proposed. The mode of failure at high actuation voltages is analyzed and established through experiments. Issues like stiction due to high voltages and effect of high residual stress are studied experimentally.
Keywords :
micromechanical devices; semiconductor device reliability; varactors; reliability analysis; self-actuation; torsional MEMS varactor; MEMS varactors; Microelectromechanical systems (MEMS) varactors; Self-actuation; residual; self-actuation; stiction;
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
DOI :
10.1109/TDMR.2007.914016
