DocumentCode
1003710
Title
First results on the characterization of new semitransparent amorphous silicon sensors
Author
Calderó, Alicia ; Virto, Amparo L. ; Raigon, Jose Miguel Luque
Author_Institution
Inst. de Fisica de Cantabria, Univ. de Cantabria, Santander, Spain
Volume
54
Issue
4
fYear
2005
Firstpage
1422
Lastpage
1426
Abstract
This paper presents the first results on the performance of a new generation of semitransparent amorphous silicon position detectors having very good properties, such as a spatial reconstruction precision better than 10 μm, deflection angles smaller than 10 μrad and transmission in the visible higher than 80%. In addition, the sensitive area is very large: 30×30 cm2.
Keywords
amorphous semiconductors; elemental semiconductors; position measurement; sensors; silicon; transparency; 30 cm; Si; amorphous silicon sensor; deflection angles; position-sensing detector; semitransparent sensor; spatial reconstruction; Amorphous silicon; Character generation; Detectors; Laser beams; Magnetic sensors; Mechanical sensors; Optical sensors; Sensor phenomena and characterization; Strips; Thin film sensors; Alignment; amorphous silicon sensors; position-sensing detectors; silicon sensors; transparent position detectors;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/TIM.2005.851231
Filename
1468548
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