DocumentCode
1003892
Title
Planar inductor
Author
Kawabe, K. ; Koyama, H. ; Shirae, K.
Author_Institution
Osaka University, Toyonaka, Osaka, Japan
Volume
20
Issue
5
fYear
1984
fDate
9/1/1984 12:00:00 AM
Firstpage
1804
Lastpage
1806
Abstract
As the first step for developing magnetic I.C, planar inductors have been investigated. Planar inductor, which does not require conventional winding, consists of planar coil and two magnetic films which sandwich the coil. Design parameters have been obtained for four types of planar inductors, hoop type, spiral type, meander type and closed type. We fabricated a hoop type and a meander type planar inductor. The inductance of the hoop type was about 40 nH at 1 MHz, and showed flatness up to 10 MHz. In the meander type, the inductance was about 100 nH at 1 MHz, and showed a flat response till 40 MHz.
Keywords
Inductors; Capacitance; Coils; Copper; Dielectrics and electrical insulation; Fabrication; Frequency; Inductance; Inductors; Magnetic films; Spirals;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1984.1063271
Filename
1063271
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