Title :
Two conductor levels block replication for 4 µm period ion implanted devices
Author :
Magnin, J. ; Poirie, M. ; Fedeli, J.M. ; Delaye, M.T.
Author_Institution :
Sagem, de la Tour Billy, BP, Agenteuil, France
fDate :
9/1/1984 12:00:00 AM
Abstract :
Ion implanted devices are promising for high density bubble memories, however if one wants them to be driven by existing 1 Mbit LSI chips, a block replicate gate is a necessary function. Bubble stretching and cutting are done by two different conductors on two different levels in order to have good control of both actions. Device processing and gate operation are described. Good margins are obtained on a large temperature scale.
Keywords :
Magnetic bubble device fabrication; Magnetic bubble generators; Magnetic bubble memories; Anisotropic magnetoresistance; Annealing; Chromium; Conductors; Garnets; Gold; Hydrogen; Iron; Temperature; Virtual manufacturing;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1984.1063285