DocumentCode

1004524

Title

Reactive ion etching of beta-SiC in CCL₂F₂O₂

Author

Kuzmik, J. ; Michelakis, C. ; Konstantinidis, G. ; Papanicolaou, N.C.

Volume

29

Issue

1

fYear

1993

fDate

1/7/1993 12:00:00 AM

Firstpage

18

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:19930012

Filename

256156