DocumentCode

1004616

Title

Electrical properties of Si-implanted gate oxides

Author

Kim, Jung-Ho ; Joshi, A.B. ; Lo, G.Q. ; Kwong, D.L. ; Lee, Sang-Rim

Volume

29

Issue

1

fYear

1993

fDate

1/7/1993 12:00:00 AM

Firstpage

34

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:19930022

Filename

256166