Functional and technological integration of measurement microsystems

Author

Barwicz, Andrzej

Volume

7

Issue

2

fYear

2004

fDate

6/1/2004 12:00:00 AM

Firstpage

14

Lastpage

19

Abstract

The field of measurement microsystems has progressed with advances in the fields of microelectronics, micromechanics, microoptics, and digital signal processing (DSP). In this article, the author summarizes a unified conceptual basis for measurement microsystems, discusses some specifics of integration, and describes an innovative approach to the development of a micro-opto-electrical system (MOEMS), a microspectrometer on a chip. This example highlights the complexity of the problem of transition from a successful laboratory concept proof to a product that can be manufactured.

Keywords

measurement systems; micro-optics; micromechanical devices; spectrometers; digital signal processing; measurement microsystems; microelectronics; micromechanics; microoptics; microoptoelectrical system; microspectrometer on a chip; Application specific integrated circuits; Digital signal processing; Digital signal processing chips; Electric variables measurement; Instruments; Length measurement; Microelectronics; Semiconductor device measurement; Signal processing; Time measurement;

fLanguage

English

Journal_Title

Instrumentation & Measurement Magazine, IEEE

Publisher

ieee

ISSN

1094-6969

Type

jour

DOI

10.1109/MIM.2004.1304561

Filename

1304561