DocumentCode
1005038
Title
Contact resistance of silicon-polysilicon interconnection for different current-flow geometries
Author
Walton, A.J. ; Holwill, R. ; Robertson, J.M.
Author_Institution
University of Edinburgh, Edinburgh Microfabrication Facility Department of Electrical Engineering, Edinburgh, UK
Volume
21
Issue
1
fYear
1985
Firstpage
13
Lastpage
14
Abstract
The relationship between contact window dimensions, specific contact resistivity ¿c and sheet resistance on contact resistance has been investigated for different current-flow geometries. It is shown that as the window size is reduced, ¿c starts to become the dominant factor giving contact resistances independent of the direction of current flow.
Keywords
VLSI; contact resistance; ohmic contacts; contact resistances; contact resistivity; contact window dimensions; current-flow geometries; sheet resistance;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19850009
Filename
4250809
Link To Document