DocumentCode :
1005877
Title :
Plasma Processes for Electrical and Electronics Applications
Author :
Sadhir, R.K. ; Saunders, H.E.
Author_Institution :
Dielectrics and Insulation Department Westinghouse R&D Center
Volume :
2
Issue :
6
fYear :
1986
Firstpage :
8
Lastpage :
14
Abstract :
Thin, plasma-induced polymer films display such properties as higher conductivity, impermeability, and shear strength, and promise to prove useful in a wide variety of industrial applications.
Keywords :
Glow discharges; Plasma applications; Plasma density; Plasma materials processing; Plasma properties; Plasma temperature; Plasma welding; Polymer films;
fLanguage :
English
Journal_Title :
Electrical Insulation Magazine, IEEE
Publisher :
ieee
ISSN :
0883-7554
Type :
jour
DOI :
10.1109/MEI.1986.290477
Filename :
4070352
Link To Document :
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