Title :
Plasma Processes for Electrical and Electronics Applications
Author :
Sadhir, R.K. ; Saunders, H.E.
Author_Institution :
Dielectrics and Insulation Department Westinghouse R&D Center
Abstract :
Thin, plasma-induced polymer films display such properties as higher conductivity, impermeability, and shear strength, and promise to prove useful in a wide variety of industrial applications.
Keywords :
Glow discharges; Plasma applications; Plasma density; Plasma materials processing; Plasma properties; Plasma temperature; Plasma welding; Polymer films;
Journal_Title :
Electrical Insulation Magazine, IEEE
DOI :
10.1109/MEI.1986.290477