Title :
Standard instrument configuration for parametric testing
Author :
Walton, A.J. ; Robertson, J.M. ; Holwill, R. ; Moore, M.B.
Author_Institution :
University of Edinburgh, Edinburgh Microfabrication Facility, Department of Electrical Engineering, Edinburgh, UK
Abstract :
A standard configuration for parametric test structures is proposed which can then be measured using instrumentation which is hardwired to the probes. The appropriate connections are made on-chip, which significantly reduces the complexity and expense of the measurement system.
Keywords :
automatic testing; integrated circuit testing; IC testing; hardwiring; instrument configuration; onchip testing; parametric testing; process control chips;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19850090
