Abstract :
A surface transverse wave (STW) 2-port asynchronous resonator on BT-cut (-50.5degYX90deg) quartz was fabricated, measured, and calculated. At a frequency of about 332.4 MHz, insertion loss, and loaded and unloaded quality factors of about 11 dB, 8,000, and 11,500, respectively, were achieved. A turnover temperature of about 20degC and a quadratic frequency-temperature coefficient of approximately -15 ppb/degC2 were obtained. Compared with STW resonators on AT-cut quartz (36degYX90deg), this temperature coefficient is about 4 times smaller, and about 2 times smaller than that for SAW on an ST cut. STW resonators and filters on BT-cut quartz can be used in applications requiring improved temperature stability.
Keywords :
quartz; stability; surface acoustic wave devices; BT-cut quartz; SiO2; quadratic frequency-temperature coefficient; surface transverse wave; temperature stability; two-port asynchronous resonator; Frequency estimation; Frequency measurement; Gratings; Loss measurement; Phase measurement; Position measurement; Temperature; Thickness measurement; Time measurement; Velocity measurement; Acoustics; Computer-Aided Design; Crystallization; Equipment Design; Equipment Failure Analysis; Quartz; Scattering, Radiation; Temperature; Transducers; Vibration;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
