DocumentCode
1008845
Title
On-chip switching for DC parametric testing
Author
Walton, A.J. ; Robertson, J.M. ; Holwill, R. ; Moore, Brad
Author_Institution
University of Edinburgh, Edinburgh Microfabrication Facility, Department of Electrical Engineering, Edinburgh, UK
Volume
21
Issue
10
fYear
1985
Firstpage
422
Lastpage
423
Abstract
The concept of on-chip switching for parametric testing of semiconductor processing is introduced. The feasibility of this approach is demonstrated for contact chain and diode-connected MOSFETs.
Keywords
field effect integrated circuits; integrated circuit technology; integrated circuit testing; process control; DC parametric testing; IC technology; contact chain; diode-connected MOSFETs; onchip switching; process control chip; semiconductor processing;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19850300
Filename
4251202
Link To Document