DocumentCode
1009341
Title
Simplified fabrication of magnetically coupled Josephson circuits
Author
Smith, L.N. ; Jillie, D.W. ; Kroger, H.
Author_Institution
M.I.T. Lincoln Lab., Lexington, MA
Volume
21
Issue
2
fYear
1985
fDate
3/1/1985 12:00:00 AM
Firstpage
874
Lastpage
877
Abstract
We describe a technique for fabricating magnetically coupled Josephson logic and memory circuits and SQUIDs which uses only two superconducting layers. These two layers perform multiple functions as the base and counterelectrodes of the tunnel junctions, the SQUID inductance and control lines, and the signal lines and groundplane between gates. This technique is illustrated by the specific example of a two junction, resistively damped SQUID designed to be fabricated using an all-refractory process which employs a total of five masking levels.
Keywords
Josephson devices; Coupling circuits; Etching; Fabrication; Josephson junctions; Magnetic circuits; Niobium; SQUIDs; Strips; Superconducting epitaxial layers; Superconducting magnets;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1985.1063740
Filename
1063740
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