• DocumentCode
    1009341
  • Title

    Simplified fabrication of magnetically coupled Josephson circuits

  • Author

    Smith, L.N. ; Jillie, D.W. ; Kroger, H.

  • Author_Institution
    M.I.T. Lincoln Lab., Lexington, MA
  • Volume
    21
  • Issue
    2
  • fYear
    1985
  • fDate
    3/1/1985 12:00:00 AM
  • Firstpage
    874
  • Lastpage
    877
  • Abstract
    We describe a technique for fabricating magnetically coupled Josephson logic and memory circuits and SQUIDs which uses only two superconducting layers. These two layers perform multiple functions as the base and counterelectrodes of the tunnel junctions, the SQUID inductance and control lines, and the signal lines and groundplane between gates. This technique is illustrated by the specific example of a two junction, resistively damped SQUID designed to be fabricated using an all-refractory process which employs a total of five masking levels.
  • Keywords
    Josephson devices; Coupling circuits; Etching; Fabrication; Josephson junctions; Magnetic circuits; Niobium; SQUIDs; Strips; Superconducting epitaxial layers; Superconducting magnets;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.1985.1063740
  • Filename
    1063740