Title :
Two-dimensional E-field mapping with subpicosecond temporal resolution
Author :
Meyer, K.E. ; Mourou, G.A.
Author_Institution :
University of Rochester, Laboratory for Laser Energetics, Rochester, USA
Abstract :
A new contactless reflection-mode electro-optic sampling technique is described which is capable of characterising the electrical response of microstructures in two dimensions with micrometre spatial resolution, a temporal response of a fraction of a picosecond and millivolt sensitivity. A GaAs-based sampling technique which would have minimum interference with the test circuit is also proposed.
Keywords :
VLSI; electric field measurement; field plotting; integrated circuit testing; large scale integration; GaAs-based sampling technique; LSI; VLSI testing; birefringence; contactless method; electric field distribution; electrical response; electro-optic sampling technique; micrometre spatial resolution; microstructure characterisation; millivolt sensitivity; reflection-mode; subpicosecond temporal resolution; two-dimensional E-field mapping; very-high-speed semiconductor devices;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19850401