Spectroscopic characteristics of argon plasma produced by multistage pseudospark discharges

Author

Chuen-Huei Yang ; Itoh, Kenji ; Takahashi, Shin-ichiro ; Obara, Minoru

Author_Institution

Dept. of Electr. Eng., Keio Univ., Yokohama, Japan

Volume

21

Issue

6

fYear

1993

fDate

12/1/1993 12:00:00 AM

Firstpage

731

Lastpage

738

Abstract

A measurement is made of the spectroscopic characteristics of argon plasma produced by multistage pseudospark discharges in a peculiar geometry which has not yet been reported in literature. High electron temperature, high peak current density, and a high degree of ionization are demonstrated in such a device. The population number density of the upper and lower levels of 488.0, 476.6, 514.5, 351.1, and 363.8 nm transitions in ArII and ArIII are measured. The ultraviolet emission characteristics of pure Ar and Ar/He mixture plasmas are compared. An appreciable increase is observed in peak intensities of ArIII lines when nitrogen is added to Ar

Keywords

argon; plasma diagnostics; plasma production; plasma temperature; 363.8 to 488.0 nm; Ar plasma; Ar-He mixture plasma; Ar-N₂; ArII; ArIII; degree of ionization; electron temperature; high peak current density; multistage pseudospark discharges; peak intensities; population number density; spectroscopic characteristics; ultraviolet emission characteristics; Argon; Current density; Electrons; Geometry; Plasma density; Plasma devices; Plasma measurements; Plasma properties; Plasma temperature; Spectroscopy;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.256793

Filename

256793