DocumentCode
1011806
Title
Structure and morphology of RF sputtered carbon overlayer films
Author
Agarwal, Shashi
Author_Institution
Memorex Corporation, Santa Clara, California.
Volume
21
Issue
5
fYear
1985
fDate
9/1/1985 12:00:00 AM
Firstpage
1527
Lastpage
1529
Abstract
The morphology and structure of RF sputtered carbon films have been investigated. The growth of these films is shown to take place by the formation and agglomeration of rounded particles. The film growth mechanism and the substrate nature were the primary factors determining the morphology of carbon films. The structure of the carbon films was found to be predominantly amorphous.
Keywords
Chromium; Diamond-like carbon; Electrons; Magnetic films; Optical films; Radio frequency; Sputtering; Surface cracks; Surface morphology; Surface topography;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1985.1063948
Filename
1063948
Link To Document