Alternately perpendicular polarisation in chequer-pattern matrix arrays of VCSELs

An 8×8 chequered-pattern matrix array of vertical cavity surface emitting lasers (VCSELs) with alternately perpendicular polarisation was monolithically fabricated. It consisted of 64 VCSELs with 6×4 μm² rectangular post structures placed alternately perpendicular to each other, that is, they were placed alternately parallel and orthogonal to the ⟨110⟩ direction. The polarisation angle deviations of the two directions were only 4.1° and 2.9°, respectively. These results indicate that an arbitrarily regulated-polarisation monolithic laser array can be obtained regardless of the wafer orientation