• DocumentCode
    1011928
  • Title

    Vibrating silicon diaphragm micromechanical gyroscope

  • Author

    Harris, Andrew J. ; Burdess, J.S. ; Wood, David ; Cruickshank, J. ; Cooper, G.

  • Author_Institution
    Newcastle upon Tyne Univ.
  • Volume
    31
  • Issue
    18
  • fYear
    1995
  • fDate
    8/31/1995 12:00:00 AM
  • Firstpage
    1567
  • Lastpage
    1568
  • Abstract
    The design and operation of a micromechanical gyroscope based on a vibrating diaphragm loaded with an inertial mass is described. Capacitive actuation and sensing methods are employed. Preliminary results are presented which show that mechanical and electrical coupling limit current performance which could be improved to give noise equivalent rate of turn better than 0.14°/s
  • Keywords
    elemental semiconductors; gyroscopes; micromachining; micromechanical devices; silicon; Si; capacitive actuation; capacitive sensing methods; electrical coupling; inertial mass; mechanical coupling; micromechanical gyroscope; noise equivalent rate; vibrating diaphragm;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19951070
  • Filename
    469167
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1011928