Title :
Materials modification using intense ion beams
Author :
Renk, Timothy J. ; Provencio, Paula P. ; Prasad, Somuri V. ; Shlapakovski, Anatoli S. ; Petrov, Anatoly V. ; Yatsui, Kiyoshi ; Jiang, Weihua ; Suematsu, Hisayuki
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
fDate :
7/1/2004 12:00:00 AM
Abstract :
Pulsed intense ion beams have been developed for applications including surface modification and alloying, and thin-film and nanopowder synthesis. Rapid thermal processing with ions is quite promising for large-scale commercial use, due to the high specific ion energy deposition (joules per cubic centimeter) without reflection, and to the relative efficiency and low cost of the pulsed power ion-beam drivers compared to other high-kinetic energy alternatives. We discuss in this paper the basis for the use of ions in materials processing and the methods of beam formation and impingement on material to be treated, and give examples of recent and ongoing work in materials processing.
Keywords :
ion beam assisted deposition; ion beam effects; iron alloys; metallic thin films; rapid thermal processing; stainless steel; surface alloying; surface roughness; titanium alloys; FeCCr; TiFe; high specific ion energy deposition; materials processing; nanopowder synthesis; pulsed intense ion beam effect; pulsed power ion-beam drivers; rapid thermal processing; surface alloying; surface modification; thin-film; Electron beams; Inorganic materials; Ion beams; Ion sources; Laboratories; Laser beams; Materials processing; Mechanical factors; Optical materials; Transistors;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/JPROC.2004.829024
