DocumentCode :
1012408
Title :
The Future of N/MEMS
Author :
Scott Barker, N.
Volume :
8
Issue :
6
fYear :
2007
Firstpage :
52
Lastpage :
55
Abstract :
The overall program seeks to ease transition of N/MEMS technologies into Department of Defense systems and has encouraged involvement from the commercial sector by requiring significant industrial sponsorship of each center.
Keywords :
defence industry; micromechanical devices; nanotechnology; Department of Defense systems; MEMS technologies; NEMS technologies; microelectromechanical systems; nanoelectromechanical systems; Defense industry; Design automation; Dielectric thin films; Laboratories; Micromechanical devices; Nanoelectromechanical systems; Predictive models; Radiofrequency microelectromechanical systems; Switches; Very large scale integration;
fLanguage :
English
Journal_Title :
Microwave Magazine, IEEE
Publisher :
ieee
ISSN :
1527-3342
Type :
jour
DOI :
10.1109/MMM.2007.904735
Filename :
4405049
Link To Document :
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