Keywords :
defence industry; micromechanical devices; nanotechnology; Department of Defense systems; MEMS technologies; NEMS technologies; microelectromechanical systems; nanoelectromechanical systems; Defense industry; Design automation; Dielectric thin films; Laboratories; Micromechanical devices; Nanoelectromechanical systems; Predictive models; Radiofrequency microelectromechanical systems; Switches; Very large scale integration;