Dispersion of easy axis in CoCr sputtered films

Hall hysteresis loops of CoCr sputtered films were obtained as a function of a film position on the glass substrate (26 × 76 mm²). At the edge position, the Hall hysteresis characteristics depend strongly on the film thickness; the in-plane magnetization characteristics for thinner films and the perpendicular magnetization properties for thicker films. On the other hand, the Hall hysteresis loops in center-positioned films show the perpendicular magnetization characteristics in the wide range of thickness. The direction of the easy magnetization axis was determined from the angular dependence of the Hall loop as a function of the film position in 1000 A thickness film. The easy axis inclines from the perpendicular axis to the in-plane as the position shifts to the substrate edge and the inclination direction is toward the center position.