Title :
Emerging gallium nitride based devices
Author :
Mohammad, S.N. ; Salvador, Arnel A. ; Morkoc, Hadis
Author_Institution :
Mater. Res. Lab., Illinois Univ., Urbana, IL, USA
fDate :
10/1/1995 12:00:00 AM
Abstract :
Wide bandgap GaN has long been sought for its applications to blue and UV emitters and high temperature/high power electronic devices. Recent introduction of commercial blue and blue-green LED´s have led to a plethora of activity in all three continents into the heterostructures based on GaN and its alloys with AlN and InN. In this review, the status and future prospects of emerging wide bandgap gallium nitride semiconductor devices are discussed. Recent successes in p-doping of GaN and its alloys with InN and AlN, and in n-doping with much reduced background concentrations have paved the way for the design, fabrication, and characterization of devices such as MESFET´s, MISFET´s, HBT´s, LED´s, and optically pumped lasers. We discuss the electrical properties of these devices and their drawbacks followed by future prospects. After a short elucidation of materials characteristics of the nitrides, we explore their electrical transport properties in detail. Recent progress in processing such as formation of low-resistance ohmic contacts and etching is also presented. The promising features of quarternaries and double heterostructures in relation to possible current injection lasers, LED´s, and photodetectors are also elaborated on
Keywords :
III-V semiconductors; MISFET; Schottky gate field effect transistors; etching; gallium compounds; heterojunction bipolar transistors; light emitting diodes; ohmic contacts; photodetectors; semiconductor doping; semiconductor lasers; wide band gap semiconductors; GaAlN; GaInN; GaN; HBTs; MESFETs; MISFETs; alloying; blue LEDs; blue-green LEDs; current injection lasers; double heterostructures; electrical transport; etching; high power devices; high temperature devices; low-resistance ohmic contacts; n-doping; optically pumped lasers; p-doping; photodetectors; quarternaries; semiconductor devices; wide bandgap gallium nitride; Continents; Gallium nitride; III-V semiconductor materials; MESFETs; Optical design; Optical device fabrication; Photonic band gap; Power electronics; Semiconductor devices; Temperature;
Journal_Title :
Proceedings of the IEEE