• DocumentCode
    1013250
  • Title

    Emerging gallium nitride based devices

  • Author

    Mohammad, S.N. ; Salvador, Arnel A. ; Morkoc, Hadis

  • Author_Institution
    Mater. Res. Lab., Illinois Univ., Urbana, IL, USA
  • Volume
    83
  • Issue
    10
  • fYear
    1995
  • fDate
    10/1/1995 12:00:00 AM
  • Firstpage
    1306
  • Lastpage
    1355
  • Abstract
    Wide bandgap GaN has long been sought for its applications to blue and UV emitters and high temperature/high power electronic devices. Recent introduction of commercial blue and blue-green LED´s have led to a plethora of activity in all three continents into the heterostructures based on GaN and its alloys with AlN and InN. In this review, the status and future prospects of emerging wide bandgap gallium nitride semiconductor devices are discussed. Recent successes in p-doping of GaN and its alloys with InN and AlN, and in n-doping with much reduced background concentrations have paved the way for the design, fabrication, and characterization of devices such as MESFET´s, MISFET´s, HBT´s, LED´s, and optically pumped lasers. We discuss the electrical properties of these devices and their drawbacks followed by future prospects. After a short elucidation of materials characteristics of the nitrides, we explore their electrical transport properties in detail. Recent progress in processing such as formation of low-resistance ohmic contacts and etching is also presented. The promising features of quarternaries and double heterostructures in relation to possible current injection lasers, LED´s, and photodetectors are also elaborated on
  • Keywords
    III-V semiconductors; MISFET; Schottky gate field effect transistors; etching; gallium compounds; heterojunction bipolar transistors; light emitting diodes; ohmic contacts; photodetectors; semiconductor doping; semiconductor lasers; wide band gap semiconductors; GaAlN; GaInN; GaN; HBTs; MESFETs; MISFETs; alloying; blue LEDs; blue-green LEDs; current injection lasers; double heterostructures; electrical transport; etching; high power devices; high temperature devices; low-resistance ohmic contacts; n-doping; optically pumped lasers; p-doping; photodetectors; quarternaries; semiconductor devices; wide bandgap gallium nitride; Continents; Gallium nitride; III-V semiconductor materials; MESFETs; Optical design; Optical device fabrication; Photonic band gap; Power electronics; Semiconductor devices; Temperature;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/5.469300
  • Filename
    469300