Title :
Ferrite-Integrated On-Chip Inductors for RF ICs
Author :
Yang, Chen ; Liu, Feng ; Ren, Tian-Ling ; Liu, Li-Tian ; Chen, Guang ; Guan, Xiao-Kang ; Wang, Albert ; Feng, Hai-Gang
Author_Institution :
Tsinghua Univ., Beijing
fDate :
7/1/2007 12:00:00 AM
Abstract :
This letter reports the design and fabrication of on-chip radio-frequency (RF) inductors with integrated-ferrite thin Alms, which show substantial improvement over air-cored inductors, e.g., 19%-38% and 17%-28% increase in inductance (L) for Y2.8B0.2Fe5O12 and Co7ZrO9 thin-film inductors, respectively, and 32%-55% improvement in quality factor (Q) of Co7ZrO9 sample, which are all measured across 0.1-9 GHz. It demonstrates the feasibility for making the ferrite-integrated high-performance compact on-chip inductors for RF ICs.
Keywords :
bismuth compounds; cobalt compounds; integrated circuit design; radiofrequency integrated circuits; system-on-chip; thin film inductors; yttrium compounds; Co7ZrO9 - Interface; RF IC; Y2.8Bi0.2Fe5O12 - Interface; ferrite integrated on chip inductors; quality factor; thin film inductors; Bismuth; Chromium; Fabrication; Ferrites; Iron; Magnetic resonance; Q factor; Radio frequency; Spirals; Thin film inductors; Ferrite; inductors; radio frequency (RF); thin film;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2007.900299
