DocumentCode
1014868
Title
Uncertainty Modeling and Analysis of Natural Resonant Frequency and Transconductance Parameters in Microresonators Design
Author
Attoh-Okine, Nii O.
Author_Institution
Delaware Univ., Newark
Volume
37
Issue
4
fYear
2007
fDate
7/1/2007 12:00:00 AM
Firstpage
719
Lastpage
723
Abstract
The correspondence presents a method of analyzing uncertainty in microelectromechanical systems (MEMS). A specific example is presented using comb microresonators. The equation governing the resonant frequency and the transconductance values was analyzed. The mathematical formulation of the convex model was derived. The major finding is that convex models can be used as an uncertainty analysis tool in MEMS design applications.
Keywords
micromechanical resonators; comb microresonators; microelectromechanical systems; microresonators design; natural resonant frequency; transconductance parameters; uncertainty modeling; Electrostatics; Microcavities; Micromechanical devices; Performance analysis; Resonance; Resonant frequency; Solid modeling; Transconductance; Uncertainty; Voltage; Microresonators; natural resonant frequency; transconductance; uncertainty;
fLanguage
English
Journal_Title
Systems, Man, and Cybernetics, Part C: Applications and Reviews, IEEE Transactions on
Publisher
ieee
ISSN
1094-6977
Type
jour
DOI
10.1109/TSMCC.2007.897328
Filename
4252233
Link To Document