Title :
The vacuum evaporation of single crystal thin films of silicon
Author :
Hale, A.P. ; James, B.D.
Author_Institution :
Fairchild Semiconductor Corp., Mountain View, Calif.
fDate :
3/1/1961 12:00:00 AM
Keywords :
Epitaxial growth; Filling; Gain; Germanium; Guns; Hydrogen; Magnetic fields; Masers; Semiconductor films; Semiconductor thin films; Silicon; Solid state circuits; Substrates; Temperature;
Journal_Title :
Electron Devices, IRE Transactions on
DOI :
10.1109/T-ED.1961.14735