• DocumentCode
    1016226
  • Title

    Vapor deposition of silicon

  • Author

    Sandler, N.P. ; Prussin, Simon A. ; Stevenson, Andrew

  • Author_Institution
    Pacific Semiconductors, Inc., Culver City, Calif.
  • Volume
    8
  • Issue
    2
  • fYear
    1961
  • fDate
    3/1/1961 12:00:00 AM
  • Firstpage
    175
  • Lastpage
    175
  • Keywords
    Chemical vapor deposition; Cities and towns; Epitaxial growth; Etching; Filling; Gain; Guns; Hydrogen; Magnetic fields; Masers; Shape; Silicon; Solid state circuits; Substrates; Temperature;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IRE Transactions on
  • Publisher
    ieee
  • ISSN
    0096-2430
  • Type

    jour

  • DOI
    10.1109/T-ED.1961.14740
  • Filename
    1472903
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1016226